|
週次 |
日期 |
單元主題 |
|
Week 1 |
2/21 |
Administrative Information, Course Overview, Definitions for MEMS, MEMS History |
|
Week 2 |
2/28 |
<i>Holiday</i> |
|
Week 3 |
3/07 |
Microfabrication Process / <b>HW#1</b> |
|
Week 4 |
3/14 |
Mechanics of Materials for MEMS, Structural Elements |
|
Week 5 |
3/21 |
Piezoresistive Sensing / <b>HW#2</b> |
|
Week 6 |
3/28 |
Piezoelectric Sensing |
|
Week 7 |
4/4 |
<i>Holiday</i> |
|
Week 8 |
4/11 |
Midterm |
|
Week 9 |
4/18 |
Capacitive Sensing |
|
Week 10 |
4/25 |
Sensor Characterization (in Lab224) |
|
Week 11 |
5/02 |
Sensor Characterization (<i>in Lab224</i>) |
|
Week 12 |
5/09 |
Sensing Circuits / Integration (<i>in Lab224</i>) / <b>Project Phase I & HW#3</b> |
|
Week 13 |
5/16 |
Case Study: Resonator Design / <b>HW#4</b> |
|
Week 14 |
5/23 |
Case Study: Inertial Sensor Design / <b>Project Phase II</b> |
|
Week 15 |
5/30 |
<i>Holiday</i> |
|
Week 16 |
6/06 |
Case Study: MEMS/Transistor Integration / <b>Project Phase III</b> |
|
Week 17 |
6/13 |
Project Presentation |